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XPS and SIMS depth profiling of oxynitrides

✍ Scribed by L. Vanzetti; M. Bersani; M. Sbetti; M. Anderle

Publisher: John Wiley and Sons
Year: 2000
Tongue: English
Weight: 79 KB
Volume: 30
Category: Article
ISSN: 0142-2421
DOI: 10.1002/1096-9918(200008)30:1<255::aid-sia835>3.0.co;2-7

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