✦ LIBER ✦
Enhanced Resolution of Depth Profiles Using Two-dimensional XPS Data
✍ Scribed by Aminov, K. L.; J�rgensen, J. S.; Boiden Pedersen, J.
- Publisher
- John Wiley and Sons
- Year
- 1996
- Tongue
- English
- Weight
- 529 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0142-2421
No coin nor oath required. For personal study only.
✦ Synopsis
It is shown that the accuracy by which a concentratiodepth profile can be estimated from the inelastic background of an XPS spectrum is dramatically improved by using two-dimensional (2D) data. The energy loss distribution of the photoelectrons for several values of the detection angle, or the energy of the excitation source, are treated as a single 2D data set. The resolution of the depth profile estimated from this set is far better than can be obtained from any single XPS spectrum.