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Effect of primary oxygen ion implantation on SIMS depth profiling in glasses

✍ Scribed by Marek Tuleta

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
247 KB
Volume
252
Category
Article
ISSN
0169-4332

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Secondary ion yields are known to be strongly enhanced by the presence of oxygen in the analysed sample. The magnitude of the yield enhancement is often signiÐcantly di †erent for impurity and matrix ion species. This kind of SIMS matrix e †ect severely aggravates concentration calibration in depth