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Effect of lattice damage on impurity depth profiles in BF2+-implanted silicon

✍ Scribed by M.C. Paek; H.B. Im; O.J. Kwon; S.W. Kang

Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
633 KB
Volume
43-44
Category
Article
ISSN
0257-8972

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