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On the role of fluorine in BF2+ implanted silicon

✍ Scribed by G.S. Virdi; C.M.S. Rauthan; B.C. Pathak; W.S. Khokle; S.K. Gupta; Krishan Lal

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 429 KB
Volume: 35
Category: Article
ISSN: 0038-1101
DOI: 10.1016/0038-1101(92)90117-u

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