✦ LIBER ✦
On the role of fluorine in BF2 implanted silicon : G. S. Virdi et al. Solid-St. Electron. 35, 535 (1992)
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 166 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0026-2714
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