✦ LIBER ✦

Formation of shallow p+n junctions by implanting BF2− ions into thin cobalt films on silicon substrates

✍ Scribed by M.H. Juang; H.C. Cheng

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Formation of shallow p + n junctions by

📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 51 KB

Characterization of silicided shallow n+

✍ M.H. Juang; H.C. Cheng 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 618 KB

Formation of self-aligned TiSi2p+−n junc

✍ M.H. Juang; H.C. Cheng 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 578 KB

Formation of thin Si3N4 films by nitroge

✍ A.D. Yadav; M.C. Joshi 📂 Article 📅 1979 🏛 Elsevier Science 🌐 English ⚖ 30 KB

Formation of thin SiO2 films by high dos

✍ J. Dylewski; M.C. Joshi 📂 Article 📅 1976 🏛 Elsevier Science 🌐 English ⚖ 557 KB