Formation of shallow p + n junctions by implanting BF2 ions into thin cobalt films on silicon substrates: M. H. Juang and H. C. Cheng. Solid-St. Electron. 35, 453 (1992)

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 51 KB
• Volume: 32
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(92)90424-j