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Effects of primary ion polyatomicity and kinetic energy on secondary ion yield and internal energy in sims

✍ Scribed by Owen W. Hand; Tapan K. Majumdar; R. Graham Cooks

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 695 KB
Volume: 97
Category: Article
ISSN: 0168-1176
DOI: 10.1016/0168-1176(90)85038-4

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