Influence of primary ion beam irradiation conditions on the depth profile of hydrogen in tantalum film

✍ Scribed by T. Asakawa; D. Nagano; S. Denda; K. Miyairi

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 405 KB
• Volume: 255
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2008.05.042