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Processing of Y 2 O 3 Thin Films by Atomic Layer Deposition from Cyclopentadienyl-Type Compounds and Water as Precursors

✍ Scribed by Niinistö, Jaakko; Putkonen, Matti; Niinistö, Lauri

Book ID: 126817877
Publisher: American Chemical Society
Year: 2004
Tongue: English
Weight: 144 KB
Volume: 16
Category: Article
ISSN: 0897-4756
DOI: 10.1021/cm040145v

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