✦ LIBER ✦
ZrO2 Thin Films Grown on Silicon Substrates by Atomic Layer Deposition with Cp2Zr(CH3)2 and Water as Precursors
✍ Scribed by M. Putkonen; J. Niinistö; K. Kukli; T. Sajavaara; M. Karppinen; H. Yamauchi; L. Niinistö
- Publisher
- John Wiley and Sons
- Year
- 2003
- Tongue
- English
- Weight
- 287 KB
- Volume
- 9
- Category
- Article
- ISSN
- 0948-1907
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