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Surface-Controlled Deposition of Sc 2 O 3 Thin Films by Atomic Layer Epitaxy Using β-Diketonate and Organometallic Precursors

✍ Scribed by Putkonen, Matti; Nieminen, Minna; Niinistö, Jaakko; Niinistö, Lauri; Sajavaara, Timo

Book ID: 125959255
Publisher: American Chemical Society
Year: 2001
Tongue: English
Weight: 144 KB
Volume: 13
Category: Article
ISSN: 0897-4756
DOI: 10.1021/cm011138z

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