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Chemically conformal deposition of SrTiO3 thin films by Atomic Layer Deposition using conventional metal organic precursors and remote-plasma activated H2O

✍ Scribed by Sang Woon Lee; Oh Seong Kwon; Cheol Seong Hwang

Book ID: 108207474
Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 342 KB
Volume: 80
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2005.04.060

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