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Deposition of yttria-stabilized zirconia thin films by atomic layer epitaxy from β-diketonate and organometallic precursors

✍ Scribed by Putkonen, Matti; Sajavaara, Timo; Niinistö, Jaakko; Johansson, Leena-Sisko; Niinistö, Lauri

No coin nor oath required. For personal study only.

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