✦ LIBER ✦

Formation and stability of lanthanum oxide thin films deposited from β-diketonate precursor

✍ Scribed by Minna Nieminen; Matti Putkonen; Lauri Niinistö

Book ID: 108417418
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 326 KB
Volume: 174
Category: Article
ISSN: 0169-4332
DOI: 10.1016/s0169-4332(01)00149-0

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Growth of yttrium oxide thin films from

Growth of yttrium oxide thin films from β-diketonate precursor

✍ Heini Mölsä; Lauri Niinistö; Mikko Utriainen 📂 Article 📅 1994 🏛 John Wiley and Sons 🌐 English ⚖ 814 KB

CVD of Lanthanum Oxyfluoride-Based Thin

CVD of Lanthanum Oxyfluoride-Based Thin Films from a Lanthanum β-Diketonate Diglyme Precursor

✍ D. Barreca; A. Gasparotto; C. Maragno; E. Tondello; E. Bontempi; L. E. Depero; C 📂 Article 📅 2005 🏛 John Wiley and Sons 🌐 English ⚖ 548 KB

Atomic layer deposition of rare earth ox

Atomic layer deposition of rare earth oxides: erbium oxide thin films from β-diketonate and ozone precursors

✍ Jani Päiväsaari; Matti Putkonen; Timo Sajavaara; Lauri Niinistö 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 153 KB

Deposition of yttria-stabilized zirconia

Deposition of yttria-stabilized zirconia thin films by atomic layer epitaxy from β-diketonate and organometallic precursors

✍ Putkonen, Matti; Sajavaara, Timo; Niinistö, Jaakko; Johansson, Leena-Sisko; Niin 📂 Article 📅 2002 🏛 Royal Society of Chemistry 🌐 English ⚖ 270 KB

Nickel β-diketonate complexes as precurs

Nickel β-diketonate complexes as precursors for the photochemical deposition of nickel oxide thin films

✍ G. E. Buono-Core; M. Tejos; G. Alveal; R. H. Hill 📂 Article 📅 2000 🏛 Springer 🌐 English ⚖ 500 KB

Low-Temperature ALE Deposition of Y2O3 T

Low-Temperature ALE Deposition of Y2O3 Thin Films from β-Diketonate Precursors

✍ M. Putkonen; T. Sajavaara; L.-S. Johansson; L. Niinistö 📂 Article 📅 2001 🏛 John Wiley and Sons 🌐 English ⚖ 461 KB 👁 1 views

Yttrium oxide thin film deposition by atomic layer epitaxy (ALE) was studied at 200±425 C using Y(thd) 3 , Y(thd) 3 (bipyridyl), or Y(thd) 3 (1,10-phenanthroline) (thd = 2,2,6,6-tetramethyl-3,5-heptanedione) as an yttrium precursor, and ozone as an oxygen source. All yttrium precursors were analyzed