CVD of Lanthanum Oxyfluoride-Based Thin Films from a Lanthanum β-Diketonate Diglyme Precursor

✍ Scribed by D. Barreca; A. Gasparotto; C. Maragno; E. Tondello; E. Bontempi; L. E. Depero; C. Sada

• Book ID: 102815496
• Publisher: John Wiley and Sons
• Year: 2005
• Tongue: English
• Weight: 548 KB
• Volume: 11
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/cvde.200506412