Plasma Characteristics of Large Area Inductively Coupled Plasma System Using Ferrite-Module-Enhanced U-Type Antenna

✍ Scribed by Kim, Kyong Nam; Lim, Jong Hyeuk; Yeom, Geun Young

• Book ID: 126507321
• Publisher: Institute of Pure and Applied Physics
• Year: 2009
• Tongue: English
• Weight: 156 KB
• Volume: 48
• Category: Article
• ISSN: 0021-4922
• DOI: 10.1143/JJAP.48.116006