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Ferrite-Enhanced U-Shaped Internal Antenna for Large-Area Inductively Coupled Plasma System

✍ Scribed by Kyong Nam Kim; Jong Hyeuk Lim; Woong Sun Lim; Geun Young Yeom

Book ID: 114667263
Publisher: IEEE
Year: 2010
Tongue: English
Weight: 454 KB
Volume: 38
Category: Article
ISSN: 0093-3813
DOI: 10.1109/tps.2009.2037966

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