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Scalable internal linear double comb-type inductively coupled plasma source for large area flat panel display processing

✍ Scribed by Kyong Nam Kim; Jong Hyeuk Lim; Jung Kyun Park; Geun Young Yeom

Book ID: 108278451
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 685 KB
Volume: 202
Category: Article
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2008.06.062

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