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Linear inductive antenna design for large area flat panel display plasma processing

✍ Scribed by K.N. Kim; J.H. Lim; H.B. Jeong; G.Y. Yeom; S.H. Lee; J.K. Lee

Book ID: 113797888
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 900 KB
Volume: 89
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2011.07.003

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