✦ LIBER ✦
Large-area low-damage plasma sources driven by multiple low-inductance-antenna modules for next-generation flat-panel display processes
✍ Scribed by Yuichi Setsuhara; Kosuke Takenaka; Akinori Ebe
- Book ID
- 108278433
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 725 KB
- Volume
- 202
- Category
- Article
- ISSN
- 0257-8972
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