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Study of Internal Linear Inductively Coupled Plasma Source for Ultra Large-Scale Flat Panel Display Processing

✍ Scribed by Jong Hyeuk Lim; Kyong Nam Kim; Gwang Ho Gweon; Jae Beom Park; Geun Young Yeom

Book ID: 106490990
Publisher: Springer
Year: 2009
Tongue: English
Weight: 243 KB
Volume: 29
Category: Article
ISSN: 0272-4324
DOI: 10.1007/s11090-009-9176-0

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