Characteristics of Inductively Coupled Plasma using Internal Double Comb-type Antenna for Flat Panel Display Processing

✍ Scribed by Lim, Jong Hyeuk; Kim, Kyong Nam; Park, Jung Kyun; Park, Jae Hun; Yeom, Geun Young

• Book ID: 127312775
• Publisher: Institute of Pure and Applied Physics
• Year: 2007
• Tongue: English
• Weight: 144 KB
• Volume: 46
• Category: Article
• ISSN: 0021-4922
• DOI: 10.1143/jjap.46.l1216