The Spatial Effects of Antenna Configuration in a Large Area Inductively Coupled Plasma System for Flat Panel Displays

✍ Scribed by Oh, Seon-Geun; Lee, Young-Jun; Jeon, Jae-Hong; Seo, Jong-Hyeon; Choe, Hee-Hwan

• Book ID: 127244028
• Publisher: IOP Publishing
• Year: 2014
• Tongue: English
• Weight: 760 KB
• Volume: 16
• Category: Article
• ISSN: 1009-0630
• DOI: 10.1088/1009-0630/16/8/06