✦ LIBER ✦
The influence of antenna configuration and standing wave effects on density profile in a large-area inductive plasma source
✍ Scribed by Wu, Yaoxi; Lieberman, M A
- Book ID
- 125512810
- Publisher
- Institute of Physics
- Year
- 2000
- Tongue
- English
- Weight
- 175 KB
- Volume
- 9
- Category
- Article
- ISSN
- 0963-0252
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