Characteristics of Large Area Inductively Coupled Plasma Using a Multiple Linear Antennas with U-Type Parallel Connection for Flat Panel Display Processing

✍ Scribed by Kim, Kyong Nam; Min, Kyung Seok; Yeom, Geun Young

• Book ID: 126514784
• Publisher: Institute of Pure and Applied Physics
• Year: 2006
• Tongue: English
• Weight: 184 KB
• Volume: 45
• Category: Article
• ISSN: 0021-4922
• DOI: 10.1143/JJAP.45.8869