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Low-impedance internal linear inductive antenna for large-area flat panel display plasma processing

✍ Scribed by Kim, K. N.; Jung, S. J.; Lee, Y. J.; Yeom, G. Y.; Lee, S. H.; Lee, J. K.

Book ID: 121679971
Publisher: American Institute of Physics
Year: 2005
Tongue: English
Weight: 421 KB
Volume: 97
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1861136

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