✦ LIBER ✦
Plasma Characteristics of a Ni–Zn Ferrite Enhanced Internal-Type Inductively Coupled Plasma Source Operated at 2 and 13.56
✍ Scribed by Kyong Nam Kim; Jong Hyeuk Lim; Geun Young Yeom
- Publisher
- Springer
- Year
- 2009
- Tongue
- English
- Weight
- 249 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0272-4324
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