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Effect of Capacitor Installed in Series With a Ferrite-Enhanced Internal Linear-Type Antenna on the Properties of an Inductively Coupled Plasma

✍ Scribed by Gwang Ho Gweon, ; Jong Hyeuk Lim, ; Seung Pyo Hong, ; Geun Young Yeom,


Book ID
121761974
Publisher
IEEE
Year
2010
Tongue
English
Weight
283 KB
Volume
38
Category
Article
ISSN
0093-3813

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