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Perhydropolysilazane spin-on-dielectric passivation buffer layers for AlGaN/GaN high-electron mobility transistors

✍ Scribed by Ko, P.S.; Han, M.; Kim, S.D.

Book ID: 120326809
Publisher: The Institution of Electrical Engineers
Year: 2012
Tongue: English
Weight: 314 KB
Volume: 48
Category: Article
ISSN: 0013-5194
DOI: 10.1049/el.2012.3363

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