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Pentamethylcyclopentadienyl Disilane as a Novel Precursor for the CVD of Thin Silicon Films

✍ Scribed by A. Klipp; F. Hamelmann; G. Haindl; J. Hartwich; U. Kleineberg; P. Jutzi; U. Heinzmann

Publisher
John Wiley and Sons
Year
2000
Tongue
English
Weight
309 KB
Volume
6
Category
Article
ISSN
0948-1907

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