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Cyclopentadienyl Germanes as Novel Precursors for the CVD of Thin Germanium Films

✍ Scribed by K. Dittmar; P. Jutzi; J. Schmalhorst; G. Reiss

Publisher
John Wiley and Sons
Year
2001
Tongue
English
Weight
255 KB
Volume
7
Category
Article
ISSN
0948-1907

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