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Anhydrous Metal Nitrates as Volatile Single Source Precursors for the CVD of Metal Oxide Films

✍ Scribed by Daniel G. Colombo; David C. Gilmer; Victor G. Young Jr.; Stephen A. Campbell; Wayne L. Gladfelter

Publisher: John Wiley and Sons
Year: 1998
Tongue: English
Weight: 171 KB
Volume: 04
Category: Article
ISSN: 0948-1907
DOI: 10.1002/(sici)1521-3862(199812)04:06<220::aid-cvde220>3.0.co;2-e

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