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The Preparation of Titanium-Based Thin Film by CVD Using Titanium Chlorides as Precursors

✍ Scribed by Chi-Young Lee

Publisher: John Wiley and Sons
Year: 1999
Tongue: English
Weight: 457 KB
Volume: 5
Category: Article
ISSN: 0948-1907
DOI: 10.1002/(sici)1521-3862(199903)5:2<69::aid-cvde69>3.0.co;2-o

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