Growth of cubic (100) SrTiO3 thin films by plasma-enhanced chemical vapor deposition using a novel titanium precursor

✍ Scribed by Dr. Helga Holzschuh; Prof. Harald Suhr

• Publisher: John Wiley and Sons
• Year: 1992
• Tongue: English
• Weight: 352 KB
• Volume: 4
• Category: Article
• ISSN: 0935-9648
• DOI: 10.1002/adma.19920040509