✦ LIBER ✦
The deposition of aluminum nitride thin films by metal-organic CVD—an alternative precursor system
✍ Scribed by Dr. Anthony C. Jones; John Auld; Simon A. Rushworth; Prof. Edward W. Williams; Dr. Peter W. Haycock; Dr. Chiu C. Tang; Dr. Gary W. Critchlow
- Publisher
- John Wiley and Sons
- Year
- 1994
- Tongue
- English
- Weight
- 395 KB
- Volume
- 6
- Category
- Article
- ISSN
- 0935-9648
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