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Passivation of Optically Black Silicon by Atomic Layer Deposited Al2O3

✍ Scribed by Otto, Martin; Kroll, Matthias; Käsebier, Thomas; Ziegler, Johannes; Sprafke, Alexander N.; Wehrspohn, Ralf B.

Book ID: 123322273
Publisher: Elsevier
Year: 2013
Weight: 392 KB
Volume: 38
Category: Article
ISSN: 1876-6102
DOI: 10.1016/j.egypro.2013.07.357

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