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Surface passivation of nano-textured silicon solar cells by atomic layer deposited Al2O3 films

โœ Scribed by Dou, Bingfei; Jia, Rui; Sun, Yun; Li, Haofeng; Chen, Chen; Jin, Zhi; Liu, Xinyu


Book ID
121343768
Publisher
American Institute of Physics
Year
2013
Tongue
English
Weight
781 KB
Volume
114
Category
Article
ISSN
0021-8979

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Properties of Al2O3-films deposited on s
โœ Per Ericsson; Stefan Bengtsson; Jarmo Skarp ๐Ÿ“‚ Article ๐Ÿ“… 1997 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 293 KB

A1203-films deposited by atomic layer epitaxy onto silicon wafers were investigated structurally and electrically. A post-deposition anneal at 900ยฐC resulted in a decrease in film thickness of about 10% and an increase in the index of refraction of about 3%. The densification did not significantly i