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Effective Passivation of Black Silicon Surfaces by Atomic Layer Deposition

✍ Scribed by Repo, Päivikki; Haarahiltunen, Antti; Sainiemi, Lauri; Yli-Koski, Marko; Talvitie, Heli; Schubert, Martin C.; Savin, Hele

Book ID: 120584382
Publisher: Institute of Electrical and Electronics Engineers
Year: 2013
Tongue: English
Weight: 577 KB
Volume: 3
Category: Article
ISSN: 2156-3381
DOI: 10.1109/JPHOTOV.2012.2210031

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