Passivation of black silicon boron emitters with atomic layer deposited aluminum oxide

✍ Scribed by Repo, Päivikki; Benick, Jan; Gastrow, Guillaume von; Vähänissi, Ville; Heinz, Friedemann D.; Schön, Jonas; Schubert, Martin C.; Savin, Hele

• Book ID: 120930809
• Publisher: John Wiley and Sons
• Year: 2013
• Tongue: English
• Weight: 461 KB
• Volume: 7
• Category: Article
• ISSN: 1862-6254
• DOI: 10.1002/pssr.201308096