High-Speed Spatial Atomic-Layer Deposition of Aluminum Oxide Layers for Solar Cell Passivation

✍ Scribed by Paul Poodt; Adriaan Lankhorst; Fred Roozeboom; Karel Spee; Diederik Maas; Ad Vermeer

• Publisher: John Wiley and Sons
• Year: 2010
• Tongue: English
• Weight: 433 KB
• Volume: 22
• Category: Article
• ISSN: 0935-9648
• DOI: 10.1002/adma.201000766