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Ozone-based Batch Atomic Layer Deposited Al2O3 for Effective Surface Passivation

✍ Scribed by von Gastrow, Guillaume; Li, Shuo; Repo, Päivikki; Bao, Yameng; Putkonen, Matti; Savin, Hele

Book ID: 123451720
Publisher: Elsevier
Year: 2013
Weight: 426 KB
Volume: 38
Category: Article
ISSN: 1876-6102
DOI: 10.1016/j.egypro.2013.07.361

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