Role of surface fixed charge in the surface passivation of thermal atomic layer deposited Al2O3on crystalline-Si

✍ Scribed by Dou, Y. N.; He, Y.; Huang, C. Y.; Zhou, C. L.; Ma, X. G.; Chen, R.; Chu, J. H.

• Book ID: 118782202
• Publisher: Springer
• Year: 2012
• Tongue: English
• Weight: 439 KB
• Volume: 109
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s00339-012-7097-x