Surface passivation of III-V compound semiconductors using atomic-layer-deposition-grown Al2O3

✍ Scribed by Huang, M. L.; Chang, Y. C.; Chang, C. H.; Lee, Y. J.; Chang, P.; Kwo, J.; Wu, T. B.; Hong, M.

• Book ID: 118230481
• Publisher: American Institute of Physics
• Year: 2005
• Tongue: English
• Weight: 419 KB
• Volume: 87
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.2146060