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High-rate atomic layer deposition of Al2O3 for the surface passivation of Si solar cells

✍ Scribed by Florian Werner; Walter Stals; Roger Görtzen; Boris Veith; Rolf Brendel; Jan Schmidt

Book ID: 116425626
Publisher: Elsevier
Year: 2011
Weight: 564 KB
Volume: 8
Category: Article
ISSN: 1876-6102
DOI: 10.1016/j.egypro.2011.06.140

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