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On the hydrogen incorporation, intrinsic stress and thermal stability of hydrogenated amorphous carbon films deposited from an electron cyclotron resonance plasma

✍ Scribed by M Benlahsen; B Racine; K Zellama; G Turban


Book ID
117144973
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
139 KB
Volume
283
Category
Article
ISSN
0022-3093

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