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Structural and electronic properties of electron cyclotron resonance plasma deposited hydrogenated amorphous carbon and carbon nitride films

✍ Scribed by C. Godet; N. M. J. Conway; J. E. Bourée; K. Bouamra; A. Grosman; C. Ortega


Book ID
125842546
Publisher
American Institute of Physics
Year
2002
Tongue
English
Weight
425 KB
Volume
91
Category
Article
ISSN
0021-8979

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