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Structural characterization of amorphous hydrogenated carbon and carbon nitride films deposited by plasma-enhanced CVD

✍ Scribed by Freire, F.L.; Mariotto, G.; Brusa, R.S.; Zecca, A.; Achete, C.A.


Book ID
123226695
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
420 KB
Volume
4
Category
Article
ISSN
0925-9635

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