✦ LIBER ✦

Amorphous hydrogenated carbon nitride films obtained by plasma-enhanced chemical vapour deposition

✍ Scribed by F.L. Freire Jr.; G. Mariotto; C.A. Achete; D.F. Franceschini

Book ID: 118406703
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 394 KB
Volume: 74-75
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(95)08244-1

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Properties of hydrogenated amorphous/nan

Properties of hydrogenated amorphous/nanocrystalline carbon films prepared by plasma enhanced chemical vapour deposition

✍ Huran, J; Zat'ko, B; Boháček, P; Kobzev, A P; Vincze, A; Malinovský, E; Valovič, 📂 Article 📅 2010 🏛 IOP Publishing ⚖ 386 KB

Chemical stability of hydrogen-containin

Chemical stability of hydrogen-containing boron nitride films obtained by plasma enhanced chemical vapour deposition

✍ Z.L. Akkerman; M.L. Kosinova; N.I. Fainer; Yu.M. Rumjantsev; N.P. Sysoeva 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 496 KB

Preparation of hydrogenated amorphous si

Preparation of hydrogenated amorphous silicon carbide thin films by plasma enhanced chemical vapour deposition

✍ J Huran; J Šafránková; A.P. Kobzev 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 252 KB

Thin silicon carbide (SiCI films were prepared by plasma enhanced chemical vapour deposition PECVDI. The structural properties of Sic films were investigated by IR, RBS, and ERD measurement techniques. The results showed that the films contain the typical features found in hydrogenated amorphous Sic

Study of the chemical composition of sil

Study of the chemical composition of silicon nitride films obtained by chemical vapour deposition and plasma-enhanced chemical vapour deposition

✍ C. Oliveri; F. Baroetto; C. Magro 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 401 KB

Plasma treatment effects on hydrogenated

Plasma treatment effects on hydrogenated amorphous carbon films prepared by plasma-enhanced chemical vapor deposition

✍ Jun Wu; Ying-Lang Wang; Cheng-Tzu Kuo 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 410 KB

Crystalline carbon nitride films prepare

Crystalline carbon nitride films prepared by microwave plasma chemical vapour deposition

✍ Jinchun Jiang; Wenjuan Cheng; Yang Zhang; Hesun Zhu; Dezhong Shen 📂 Article 📅 2006 🏛 Springer 🌐 English ⚖ 297 KB